Novel Applications of MOEMS Display and Imaging
نویسنده
چکیده
Significant progresses have been made in MOEMS for display, imaging, telecommunication, and bioinstrumentation applications. This talk will first provide an overview of the recent advances in micromirror technologies. Then it will discuss three novel applications using MEMS micromirrors. First, a large port count wavelength-selective switch using a one-dimensional array of two-axis analog micromirrors will be described. Then the fabrication and packaging of twoaxis micromirrors for in vivo endoscopic optical coherence tomography (OCT) imaging will be presented. Finally a new “optoelectronic tweezers” for manipulating microparticles and biological cells using direct images of MOEMS spatial light modulators will be described.
منابع مشابه
Moems - Mems 2006 2006
Devices/Applications/Reliability 6111 Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V (Tanner/Ramesham) 6112 Microfluidics, BioMEMS, and Medical Microsystems IV (Papautsky/Wang/Vauchier) 6113 MEMS/MOEMS Components and Their Applications III (Olivier/Tadigadapa/Henning) 6114 MOEMS, Display, Imaging, and Miniaturized Microsystems IV (Ürey/Dickensheets/Gogoi) Founding Chair M...
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